Design of special controller for image measuring instrument of macro-micro composite workpiece stage

YU Si-yang et al

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Manufacturing Automation ›› 2024, Vol. 46 ›› Issue (4) : 184-189.

Design of special controller for image measuring instrument of macro-micro composite workpiece stage

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}. 2024, 46(4): 184-189.

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