Cooling system for ion beam etching equipment

YUAN Zu-hao et al

PDF(4503 KB)
PDF(4503 KB)
Manufacturing Automation ›› 2024, Vol. 46 ›› Issue (2) : 61-63.

Cooling system for ion beam etching equipment

    {{javascript:window.custom_author_en_index=0;}}
  • {{article.zuoZhe_EN}}
Author information +
History +

HeighLight

{{article.keyPoints_en}}

Abstract

{{article.zhaiyao_en}}

Key words

Cite this article

EndNote

Ris (Procite)

Bibtex

Download Citations
{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}. 2024, 46(2): 61-63.

References

Publishing order | Descend order by publishing year | Descend order by cited within

References

{{article.reference}}

Funding

RIGHTS & PERMISSIONS

{{article.copyrightStatement_en}}
{{article.copyrightLicense_en}}
PDF(4503 KB)

Accesses

Citation

Detail
Sections
Recommended
Copyright © Manufacturing Automation, All Rights Reserved.
E-mail: ma@riamb.ac.cn
Powered by Beijing Magtech Co., Ltd.

/

〈 〉