Optimization of wafer delay time of cluster tool with chamber cleaning operation controlled by detector

PAN Chun-rong，XU Jing-wen

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Manufacturing Automation ›› 2023, Vol. 45 ›› Issue (2) : 36-42.

Optimization of wafer delay time of cluster tool with chamber cleaning operation controlled by detector

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}. 2023, 45(2): 36-42.

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