Research on crucible rotation speed control system of Czochralski single crystal furnace based on PSO-BP-PID

PENG Xin et al

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Manufacturing Automation ›› 2023, Vol. 45 ›› Issue (12) : 100-104.

Research on crucible rotation speed control system of Czochralski single crystal furnace based on PSO-BP-PID

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}. 2023, 45(12): 100-104.

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