Prediction of broken edges in shoulder stage of czochralski silicon single crystal based on borderline-smote-lightgbm

HAN Jin-xing

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Manufacturing Automation ›› 2023, Vol. 45 ›› Issue (11) : 172-177.

Prediction of broken edges in shoulder stage of czochralski silicon single crystal based on borderline-smote-lightgbm

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}. 2023, 45(11): 172-177.

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