Research on high throughput detection system of thin film resistivity and transmittance based on Hybrid method

REN Jun, LIU Yu, LIAO Cheng, HE Xu-lin, SUN Ru-hao

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Manufacturing Automation ›› 2022, Vol. 44 ›› Issue (10) : 34-37.

Research on high throughput detection system of thin film resistivity and transmittance based on Hybrid method

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}. 2022, 44(10): 34-37.

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