Research on In-situ Calibration Device of Gas Flow Controller for Semiconductor

HUI Boxu, XU Zhipeng, ZHANG Gaoming, ZHOU Bin, SUN Yingkai

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CHINESE HYDRAULICS & PNEUMATICS ›› 2025, Vol. 49 ›› Issue (1) : 90-94. DOI: 10.11832/j.issn.1000-4858.2025.01.010

Research on In-situ Calibration Device of Gas Flow Controller for Semiconductor

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}. 2025, 49(1): 90-94. https://doi.org/10.11832/j.issn.1000-4858.2025.01.010

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