Fluid Characteristics of Pneumatic Diaphragm Valves for Integrated Circuits

TANG Jin-xin, LI Pei-yuan, CHEN Bo, ZHOU Lin-zhen

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CHINESE HYDRAULICS & PNEUMATICS ›› 2023, Vol. 47 ›› Issue (5) : 135-142. DOI: 10.11832/j.issn.1000-4858.2023.05.018

Fluid Characteristics of Pneumatic Diaphragm Valves for Integrated Circuits

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}. 2023, 47(5): 135-142. https://doi.org/10.11832/j.issn.1000-4858.2023.05.018

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