GMM Thin Films Micropump Based on the Double Plane Coil Driving

KOU Qi-qi, ZHANG Hui, XU Ya-feng, MA Si-yu, WANG Chuan-li

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CHINESE HYDRAULICS & PNEUMATICS ›› 2014, Vol. 0 ›› Issue (11) : 15-18. DOI: 10.11832/j.issn.1000-4858.2014.11.004

GMM Thin Films Micropump Based on the Double Plane Coil Driving

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}. 2014, 0(11): 15-18. https://doi.org/10.11832/j.issn.1000-4858.2014.11.004

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