热致动微型阀膜片的仿真分析及工艺设计

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曹剑, 唐建忠, 朱笑丛

Simulation Analysis and Process Design of Membrane in Thermally Actuated Micro-valve

CAO Jian, TANG Jian-zhong, ZHU Xiao-cong

液压与气动 . 2014, (1): 13 -17 . DOI: 10.11832/j.issn.1000-4858.2014.01.004