感光干膜微结构模具制备关键技术
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Key Technologies for the Fabrication of Photographic DryFilm Microstructure Molds
LIU Xu-ling, LIU Wei, ZUO Wen-si, YE Guo-yong, JIN Shao-bo, LI Song-jing
液压与气动
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2024, (2): 18
-24
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DOI: 10.11832/j.issn.1000-4858.2024.02.003