采用硅流体芯片的气动位置控制系统特性研究
吴央芳, 周铖杰, 夏春林, 王玉翰, 陆倩倩
Characteristics of the Pneumatic Position Control System with the Silicon Valve
WU Yang-fang, ZHOU Cheng-jie, XIA Chun-lin, WANG Yu-han, LU Qian-qian
液压与气动
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2020, (06): 152
-159
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DOI: 10.11832/j.issn.1000-4858.2020.06.024
