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基于弹性薄板气浮垫的精密研抛机部件设计与分析
卢志伟, 屠喜, 刘波, 张君安
Design and Analysis on Parts of Precise Lapping and Polishing Machine Based on Floatation Cushion with Elastic Sheet
LU Zhi-wei, TU Xi, LIU Bo, ZHANG Jun-an
液压与气动 . 2013, (8): 93 -96 .  DOI: 10.11832/j.issn.1000-4858.2013.08.026