为便于精密机床的微进给控制,研究了一种新型的气压式微位移驱动器。根据微驱动器的工作原理,在简化模型的基础上,对驱动器进行了结构设计,用有限元方法分析了微驱动器与微驱动台的主要性能,并且采用实验验证了该设计的合理性。研究结果表明,该驱动器结构简单、可靠,具有良好的输入输出线性度,耦合位移很小,是一种良好的二维可控驱动方式,在精密加工与精密测量中有着广阔的应用前景。
Abstract
A new type of pneumatic micro-displacement actuator is introduced so as to the micro feed control for precision machine tools. According to the working principle of micro-displacement actuator, on the basis of the simplified model, the physical design of the drive structure is done. The key performance of the assembled micro-displacement actuator and micro-displacement is analyzed by finite element analysis software, and the rationality of the design is verified with experiments. The results show that the micro-displacement actuator is simple, reliable and has a good input-output linearity and low coupling displacement, it is a well-controlled micro-displacement actuator. The pneumatic micro-displacement actuator can be widely applied to the precision machining and precision measurement.
关键词
气压驱动 ;
微位移驱动器 ;
线性度 ;
二自由度
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Key words
pneumatic ;
micro-displacement actuator ;
linearity ;
two-degree of freedom
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